federal_register: E8-6816

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E8-6816 National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Proposed Rule On October 19, 2006, EPA proposed amendments to the National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing, published on May 22, 2003. The purpose of the proposed amendments was to clarify the emission requirements for process vents by establishing a new maximum achievable control technology floor level of control for existing combined hazardous air pollutants process vent streams containing inorganic and organic hazardous air pollutants and adding requirements for new and reconstructed combined hazardous air pollutants process vents. For existing combined hazardous air pollutants process vents, EPA had proposed that the floor was no control. In light of Sierra Club v. EPA, we are re-proposing the requirements for existing and new combined hazardous air pollutants process in this supplemental proposal. 2008-04-02 2008 4 https://www.federalregister.gov/documents/2008/04/02/E8-6816/national-emission-standards-for-hazardous-air-pollutants-for-semiconductor-manufacturing https://www.govinfo.gov/content/pkg/FR-2008-04-02/pdf/E8-6816.pdf Environmental Protection Agency 145 On October 19, 2006, EPA proposed amendments to the National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing, published on May 22, 2003. The purpose of the proposed amendments was to clarify the emission requirements for...  

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