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84 rows where docket_id = "EPA-HQ-OAR-2002-0086" sorted by posted_date descending

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id agency_id docket_id title document_type subtype posted_date ▲ posted_year posted_month comment_start_date comment_end_date last_modified fr_doc_num open_for_comment withdrawn object_id
EPA-HQ-OAR-2002-0086-0186 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Intel Corporation to the U.S. EPA, Total Environmental Performance Comparison of VOC Control Technologies: Case Study [A-97-15-II-D-16] Supporting & Related Material Study 2023-12-11T05:00:00Z 2023 12     2023-12-11T19:11:40Z   0 0 0900006484189b0b
EPA-HQ-OAR-2002-0086-0164 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Jo Ann Kerrick, ViGYAN, to David Markwordt, U.S. EPA. EPA and Semiconductor Industry Meeting Held December 14, 1995 [A-97-15-II-E-1] Supporting & Related Material Memorandum 2022-09-19T04:00:00Z 2022 9     2022-09-19T19:04:39Z   0 0 090000648495aa1e
EPA-HQ-OAR-2002-0086-0160 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 State of Missouri Department of Natural Resources to the U.S. EPA, Emissions Inventory Questionnaire, MEMC-St.Peters Plant, dated 4/2/98 [A-97-15-II-D-89] Supporting & Related Material Form 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:44Z   0 0 0900006484189b3c
EPA-HQ-OAR-2002-0086-0131 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Oregon Department of Environmental Quality to the U.S. EPA, Fujitsu Microelectronics, Inc., Permit Application No.016081 dated 6/11/97 [A-97-15-II-D-74] Supporting & Related Material Permit, Registration 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:19Z   0 0 090000648407e9ef
EPA-HQ-OAR-2002-0086-0142 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Texas Instruments to U.S. EPA, transmittal of December 1994 Facility Emissions. [A-97-15-II-D-38] Supporting & Related Material Data 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:29Z   0 0 0900006484189b0e
EPA-HQ-OAR-2002-0086-0121 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Agenda for Teleconference with EPA and Stakeholders regarding status of the semiconductor manufacturing NESHAP. July 7, 1998. [A-97-15-II-E-8] Supporting & Related Material Meeting Materials 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:10Z   0 0 090000648407d42e
EPA-HQ-OAR-2002-0086-0155 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Oregon Department of Environmental Quality to the U.S. EPA, memorandum dated 3/4/96 from David Sellers to Files regarding semiconductor VOC losses. [A-97-15-II-D-52] Supporting & Related Material Memorandum 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:40Z   0 0 0900006484189b37
EPA-HQ-OAR-2002-0086-0123 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 David Hendricks, EC/R Incorporated, to John Schaefer, U.S. EPA/OCG. Summary of the February 1, 2001, Semiconductor NESHAP Stakeholder Meeting. [A-97-15-II-E-10] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:11Z   0 0 090000648407d430
EPA-HQ-OAR-2002-0086-0162 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Petition to remove semiconductor manufacturing from the list of major source categories pursuant to section 112(c) of the clean air act and section 552(e) of the administrative procedure act. [A-97-15-II-D-103] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:46Z   0 0 0900006484189b3e
EPA-HQ-OAR-2002-0086-0115 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PPSG. Summary of July 22, 1997 Meeting with the Semiconductor Industry Association. [A-97-15-II-E-2] Supporting & Related Material Memorandum 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:04Z   0 0 090000648407d428
EPA-HQ-OAR-2002-0086-0163 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 J.A. Hatcher, Counsel, Latham & Watkins, Washington, D.C. on behalf of the Semiconductor Industry Association (SIA), San Jose, CA [A-97-15-IV-D-4] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:47Z   0 0 0900006484189b3f
EPA-HQ-OAR-2002-0086-0127 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Timothy G. Higgs, P.E., Emissions Estimation for a Semiconductor Manufacturing Facility, Presented at the Emission Inventory: Key to Planning, Permits, Compliance and Reporting Conference. Air and Waste Management Association; New Orleans, Louisiana, September 4-6, 1996. [A-97-15-II-I-3] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:16Z   0 0 090000648407d434
EPA-HQ-OAR-2002-0086-0108 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PPSG. Relationship of Preferred and Alternative Methods for Estimating Air Emissions from Semiconductor Manufacturing to the Semiconductor NESHAP. [A-97-15-II-B-4] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:58Z   0 0 090000648407d421
EPA-HQ-OAR-2002-0086-0149 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Texas Natural Resource Conservation Commission to the U.S. EPA, Hitachi, Irving, Dallas Technical Review [A-97-15-II-D-45] Supporting & Related Material Technical Support Document 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:35Z   0 0 0900006484189b31
EPA-HQ-OAR-2002-0086-0106 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PPSG. Permit Status of MEMC Electronic Materials, Inc. in St. Peters, Missouri. [A-97-15-II-B-1] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:57Z   0 0 090000648407d41f
EPA-HQ-OAR-2002-0086-0103 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Lesley Fritz and David Hendricks, EC/R Incorporated to Keith Barnett, U.S. EPA. MACT Floor Recommendation for Storage Tanks for the Semiconductor Manufacturing Source Category. [A-97-15-II-A-8] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:54Z   0 0 090000648407d41c
EPA-HQ-OAR-2002-0086-0113 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, Sanford Consulting, to Victoria Hsu, Texas Natural Resource Conservation Commission, Request for information. [A-97-15-II-C-3] Supporting & Related Material E-mail 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:03Z   0 0 090000648407d426
EPA-HQ-OAR-2002-0086-0097 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Jo Ann Kerrick, ViGYAN, to David Markwordt, U.S. EPA, transmittal of report characterizing the semiconductor industry HAP emissions. [A-97-15-II-A-1] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:48Z   0 0 090000648407d3f1
EPA-HQ-OAR-2002-0086-0124 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Motorola, Inc. to U.S. EPA, Source Emissions Summary MOS 21 Scrubber System, Mesa, AZ. [A-97-15-II-D-91] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:12Z   0 0 090000648407d431
EPA-HQ-OAR-2002-0086-0139 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 From Air Pollution Control, Vermont Agency of Natural Resources. Source Permit Modification for the IBM Microelectronics Facility in Essex Junction and Williston, Vermont. [A-97-15-II-D-93] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:26Z   0 0 090000648407f758
EPA-HQ-OAR-2002-0086-0100 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, ViGYAN/Indus Corporation, to Tony Wayne, U.S. EPA, transmittal of Draft Presumptive MACT for the Semiconductor Manufacturing Industry. [A-97-15-II-A-4] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:51Z   0 0 090000648407d3f4
EPA-HQ-OAR-2002-0086-0104 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 David Hendricks and Shannon Ogren, EC/R Incorporated, to John Schaefer, EPA/OAQPS/ESD/OCG. Revised MACT Floor Recommendations for Storage Tanks for the Semiconductor Manufacturing Source Category in Response to Comments Received on the Proposed Rule. [A-97-15-II-A-10] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:55Z   0 0 090000648407d41d
EPA-HQ-OAR-2002-0086-0119 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, memorandum of EPA/EPA/Semiconductor Industry Association Teleconference on January 28, 1998. [A-97-15-II-E-6] Supporting & Related Material Memorandum 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:08Z   0 0 090000648407d42c
EPA-HQ-OAR-2002-0086-0105 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 David Hendricks, EC/R Incorporated, to Semiconductor NESHAP Project File. Background Information for Evaluating Alternatives More Stringent Than the MACT Floor for Storage Tanks. [A-97-15-II-A-11] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:56Z   0 0 090000648407d41e
EPA-HQ-OAR-2002-0086-0109 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 John Schaefer, USEPA/OAQPS/ESD/OCG to Semiconductor docket. Site visit report for Eastman Kodak Company, Rochester, NY. [A-97-15-II-B-5] Supporting & Related Material Memorandum 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:59Z   0 0 090000648407d422
EPA-HQ-OAR-2002-0086-0145 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Steve Jones, South Coast Air Quality Management District, to Kathleen Boyle, ViGYAN transmittal of semiconductor regulations. [A-97-15-II-D-41] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:31Z   0 0 0900006484189b11
EPA-HQ-OAR-2002-0086-0128 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Semiconductor Industry Association Pollution Prevention & Waste Minimization Program, Report of EPA Toxic Release Inventory (TRI) Data for US Semiconductor Industry 1994, November 1996. [A-97-15-II-I-4] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:16Z   0 0 090000648407d435
EPA-HQ-OAR-2002-0086-0129 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Kirk-Othmer Encyclopedia of Chemical Technology, Fourth Edition, Recycling, Oil to Silicon, Volume 21, 1997 [A-97-15-II-I-5] Supporting & Related Material Publication - Copyrighted Materials 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:17Z   0 0 090000648407d436
EPA-HQ-OAR-2002-0086-0156 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 South Coast Air Quality Management District to the U.S. EPA, Rockwell International, Permit to Construct (Ref. Only) [A-97-15-II-D-27] Supporting & Related Material Application 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:41Z   0 0 0900006484189b38
EPA-HQ-OAR-2002-0086-0146 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Alexander Santos, California Air Resources Board, to Kathleen Boyle, ViGYAN transmittal of Bay Area Air Quality Management District... [A-97-15-II-D-42] Supporting & Related Material Memorandum 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:32Z   0 0 0900006484189b12
EPA-HQ-OAR-2002-0086-0157 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Julia A. Hatcher, Latham & Watkins Attorneys at Law, to the U.S. EPA, March 1, 1996 transmittal of 'Presumptive MACT Guidance for the Semiconductor Industry Source ' Category-Technical, Legal and Policy Considerations." [A-97-15-II-D-50] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:42Z   0 0 0900006484189b39
EPA-HQ-OAR-2002-0086-0125 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 John J. McKetta, Encyclopedia of Chemical Processing and Design, Chapter 49, Safety, OSHA Compliance to Separators, Vertical, Sizing with Computers, 1994 [A-97-15-II-I-1] Supporting & Related Material Publication - Copyrighted Materials 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:13Z   0 0 090000648407d432
EPA-HQ-OAR-2002-0086-0120 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, memorandum of EPA/EPA/Semiconductor Industry Association MACT Meeting on February 18, 1998. [A-97-15-II-E-7] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:09Z   0 0 090000648407d42d
EPA-HQ-OAR-2002-0086-0153 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 State of Missouri, Department of Natural Resources to the U.S. EPA, transmittal of Permit to Construct, MEMC Electronic Materials, Inc., Permit No.1195-016A. [A-97-15-II-D-49] Supporting & Related Material Permit, Registration 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:38Z   0 0 0900006484189b35
EPA-HQ-OAR-2002-0086-0130 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Maricopa County Environmental Community Services Agency to the U.S. EPA, transmittal of Significant Permit Revision No. S96-029,Air Quality Permit No. 8602974 [A-97-15-II-D-70] Supporting & Related Material Permit, Registration 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:18Z   0 0 090000648407e9ec
EPA-HQ-OAR-2002-0086-0107 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, Sanford Consulting, to Tony Wayne, U.S. EPA, Site Visit Report for Motorola McDowell Road Facility. [A-97-15-II-B-2] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:57Z   0 0 090000648407d420
EPA-HQ-OAR-2002-0086-0140 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Intel Corporation to the U.S. EPA, "Total Environmental Performance Comparison of VOC Control Technologies: Case Study." [A-97-15-II-D-16] Supporting & Related Material Study 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:27Z   0 0 0900006484189b0c
EPA-HQ-OAR-2002-0086-0135 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Kodak Building 81 South Upgrade Exhaust Systems Final Technical Report [A-97-15-II-D-104] Supporting & Related Material Publication - Copyrighted Materials 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:22Z   0 0 090000648407ea07
EPA-HQ-OAR-2002-0086-0110 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Frederick J. Thompson, USEPA/OAQPS/ESD/SMAG, to Penny Lassiter, USEPA/OAQPS/ESD/OCG. Voluntary Consensus Standard Results for the Semiconductor Manufacturing NESHAP Final Rule. [A-97-15-II-B-6] Supporting & Related Material Memorandum 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:00Z   0 0 090000648407d423
EPA-HQ-OAR-2002-0086-0098 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, ViGYAN, to David Markwordt, U.S. EPA, transmittal of memorandum regarding control technique costs. [A-97-15-II-A-2] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:49Z   0 0 090000648407d3f2
EPA-HQ-OAR-2002-0086-0143 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Motorola, Inc. to the U.S. EPA, Chandler, Arizona, Stack Emissions and Efficiency Tests. [A-97-15-II-D-39] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:29Z   0 0 0900006484189b0f
EPA-HQ-OAR-2002-0086-0122 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 David Hendricks and Karen Holmes, EC/R Incorporated, and Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, Summary of June 16 and 17, 1998 Semiconductor Manufacturing NESHAP Roundtable Meeting. [A-97-15-II-E-9] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:11Z   0 0 090000648407d42f
EPA-HQ-OAR-2002-0086-0144 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Oregon Department of Environmental Quality to the U.S. EPA, transmittal of Draft Oregon Title V Operating Permit Application Review Report, Intel Corporation, Permit No. 34-2681. [A-97-15-II-D-40] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:30Z   0 0 0900006484189b10
EPA-HQ-OAR-2002-0086-0118 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Jack P. Broadbent, South Coast Air Quality Management District to Wally Sanford, Sanford Consulting email regarding EPA contact. [A-97-15-II-E-5] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:07Z   0 0 090000648407d42b
EPA-HQ-OAR-2002-0086-0134 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Comment submitted by Point Sources Committee Emission Inventory Improvement Program [A-97-15-II-D-94] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:21Z   0 0 090000648407e9ff
EPA-HQ-OAR-2002-0086-0159 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 STAPPA/ALAPCO/EPA Emission Inventory Improvement Program to the U.S. EPA, "Review Draft of Preferred and Alternative Methods for Estimating Air Emissions from Semiconductor Manufacturing [A-97-15-II-D-72] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:43Z   0 0 0900006484189b3b
EPA-HQ-OAR-2002-0086-0099 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, ViGYAN, to Tony Wayne, U.S. EPA, memorandum regarding review of semiconductor permits. [A-97-15-II-A-3] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:50Z   0 0 090000648407d3f3
EPA-HQ-OAR-2002-0086-0147 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Intel Corporation to the U.S. EPA, Rio Rancho, New Mexico, "Acid Gas and Chlorine Determination from Representative Scrubbed Gas Systems," Appendix J. [A-97-15-II-D-43] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:33Z   0 0 0900006484189b2f
EPA-HQ-OAR-2002-0086-0102 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 David Hendricks, EC/R Incorporated to Tony Wayne, U.S. EPA, transmittal of Justification for Including Research and Development Operations in the Semiconductor NESHAP memorandum. [A-97-15-II-A-6] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:53Z   0 0 090000648407d41b
EPA-HQ-OAR-2002-0086-0112 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Mr. Tony Wayne, U.S. EPA to Mr. Lee Neal, Semiconductor Industry Association transmittal of letter regarding February 1998 Technical Meeting. [A-97-15-II-C-2] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:02Z   0 0 090000648407d425
EPA-HQ-OAR-2002-0086-0126 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Sandy Webb and John Hoeri, Use of Hazardous Air Pollutants in Semiconductor Manufacturing, SSA Journal, 1995. [A-97-15-II-I-2] Supporting & Related Material Publication - Copyrighted Materials 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:14Z   0 0 090000648407d433
EPA-HQ-OAR-2002-0086-0152 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Semiconductor Industry Association, to David Beck, David Markwordt, and Anthony Wayne, U.S. EPA, transmittal of letter regarding Presumptive MACT for the Semiconductor Industry. [A-97-15-II-D-48] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:37Z   0 0 0900006484189b34
EPA-HQ-OAR-2002-0086-0132 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Comment submitted by Berhanu A. Getahun, Environmental Engineer, State of Missouri, Department of Natural Resources [A-97-15-II-D-78] Supporting & Related Material Permit, Registration 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:20Z   0 0 090000648407e9f3
EPA-HQ-OAR-2002-0086-0150 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Motorola, Inc. to the U.S. EPA, Compliance Source Test Report, Phoenix, AZ, Thermal Oxidizer at COM-1. [A-97-15-II-D-46] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:35Z   0 0 0900006484189b32
EPA-HQ-OAR-2002-0086-0136 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Memorandum: List of Facility ID Codes for SIA's MACT3 Survey, dated September 23, 1998. (CBI) [A-97-15-II-D-105] Supporting & Related Material Memorandum 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:23Z   0 0 090000648407ea08
EPA-HQ-OAR-2002-0086-0158 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 From Air Pollution Control, Vermont Agency of Natural Resources. Operating Permit Application for the IBM Microelectronics Facility in Essex Junction, Vermont. [A-97-15-II-D-53] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:43Z   0 0 0900006484189b3a
EPA-HQ-OAR-2002-0086-0116 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PSG. Summary of September 9, 1997 Meeting with the Semiconductor Industry Association. [A-97-15-II-E-3] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:05Z   0 0 090000648407d429
EPA-HQ-OAR-2002-0086-0138 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 J. Michael Sherer, Motorola to Susan Wyatt, U.S. EPA, transmittal of comments on the trip report dated April 27, 1998. [A-97-15-II-D-92] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:25Z   0 0 090000648407f757
EPA-HQ-OAR-2002-0086-0151 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Motorola, Inc. to the U.S. EPA, Compliance Source Test Report, Phoenix, AZ, Thermal Oxidizer at P Building. [A-97-15-II-D-47] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:36Z   0 0 0900006484189b33
EPA-HQ-OAR-2002-0086-0111 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Mr. Tony Wayne, U.S. EPA to Mr. Lee Neal, Semiconductor Industry Association transmittal of letter regarding Final Presumptive MACT. [A-97-15-II-C-1] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:01Z   0 0 090000648407d424
EPA-HQ-OAR-2002-0086-0114 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Mr. Tony Wayne, U.S. EPA to Mr. Lee Neal, Semiconductor industry association transmittal of letter indicating initial MACT Floor findings. [A-97-15-II-C-4] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:04Z   0 0 090000648407d427
EPA-HQ-OAR-2002-0086-0154 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Julia A. Hatcher, Latham & Watkins Attorneys at Law, to David Beck, David Markwordt, and Anthony Wayne, U.S. EPA, transmittal of letter regarding Presumptive MACT for the Semiconductor Industry [A-97-15-II-D-51] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:39Z   0 0 0900006484189b36
EPA-HQ-OAR-2002-0086-0148 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Oregon Department of Environmental Quality to the U.S. EPA, Wacker Siltronic Corporation, Permit Application No.014947 dated 10/11/95. [A-97-15-II-D-44] Supporting & Related Material Permit, Registration 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:34Z   0 0 0900006484189b30
EPA-HQ-OAR-2002-0086-0137 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, Sanford Consulting, to Tony Wayne, U.S. EPA, Site Visit Report for Intel Facility, Chandler, AZ. (CBI) [A-97-15-II-B-3] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:24Z   0 0 090000648407f756
EPA-HQ-OAR-2002-0086-0133 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Maricopa County Environmental Services Department, to U.S. EPA, transmittal of facility air quality permits [A-97-15-II-D-82] Supporting & Related Material Permit, Registration 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:21Z   0 0 090000648407e9f7
EPA-HQ-OAR-2002-0086-0117 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, memorandum of EPA/Semiconductor Industry Association Meeting on December 18, 1997.[A-97-15-II-E-4] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:06Z   0 0 090000648407d42a
EPA-HQ-OAR-2002-0086-0141 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 State of New Mexico, Air Quality Bureau to the U.S. EPA, Permit No. 325-M-8,Intel Corporation, Rio Rancho Facility dated 1/17/95. [A-97-15-II-D-37] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:28Z   0 0 0900006484189b0d
EPA-HQ-OAR-2002-0086-0101 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 David Hendricks, EC/R Incorporated to Tony Wayne, U.S. EPA, transmittal of Definition of Source Category, Definition of Affected Source, and Subcategorization Issues for the Semiconductor NESHAP Project memorandum. [A-97-15-II-A-5] Supporting & Related Material Letter 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:40:52Z   0 0 090000648407d3f5
EPA-HQ-OAR-2002-0086-0161 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 SIA to U.S. EPA, transmittal of MACT 3 Survey Results from facilities 1819A, 1932A, 3493, 3719A, 3786, 3912A, 4434, 532121, 6103A, 6347A, 6393, 6412, 6786A, 8121A, 8366, and 8718A. [A-97-15-II-D-95] Supporting & Related Material Report 2020-03-11T04:00:00Z 2020 3     2020-03-11T15:41:45Z   0 0 0900006484189b3d
EPA-HQ-OAR-2002-0086-0019 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 A-97-15-F-R-MAY-8-2002 National Emission Standards for Hazardous Air Pollutants: Semiconductor Manufacturing Proposed Rule Notice of Proposed Rulemaking (NPRM) 2019-10-10T04:00:00Z 2019 10 2019-10-10T04:00:00Z 2002-07-09T03:59:59Z 2019-10-10T18:26:50Z 02-11298 0 0 090000648407d37a
EPA-HQ-OAR-2002-0086-0017 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Rule Federal Register Document 2008-07-22T04:00:00Z 2008 7     2011-06-11T15:59:06Z E8-16746 0 0 090000648068c597
EPA-HQ-OAR-2002-0086-0018 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Final Rule, Response to Comments Supporting & Related Material Comment Response 2008-07-22T04:00:00Z 2008 7     2008-07-22T12:02:09Z   0 0 090000648068a3cc
EPA-HQ-OAR-2002-0086-0014 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Memorandum to docket, Subject - Combined Hazardous Air Pollutant (HAP) Process Vent Maximum Achievable Control Technology (MACT) Floor for Semiconductor Maximum Achievable Control Technology (MACT) Supplemental Proposal (August 17, 2007) Supporting & Related Material Letter, Memorandum, Email 2008-04-02T04:00:00Z 2008 4     2008-04-02T18:17:27Z   0 0 09000064803e87d7
EPA-HQ-OAR-2002-0086-0015 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing - Office of Management and Budget (OMB) Review Supporting & Related Material Federal Register Document 2008-04-02T04:00:00Z 2008 4     2011-06-11T15:59:05Z   0 0 09000064803e881e
EPA-HQ-OAR-2002-0086-0013 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Proposed Rule Federal Register Document 2008-04-02T04:00:00Z 2008 4 2008-04-02T04:00:00Z 2008-05-03T03:59:59Z 2011-06-11T15:59:05Z E8-06816 0 0 0900006480427512
EPA-HQ-OAR-2002-0086-0006 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 National Emission Standards for Hazardous Air Pollutants (NESHAP): Semiconductor Manufacturing - Summary of Public Comments and Responses on Proposed Rule [A-97-15 II-A-12] Supporting & Related Material Comment Response 2008-02-02T13:16:35Z 2008 2     2006-09-02T14:12:29Z   0 0 09000064800bacb0
EPA-HQ-OAR-2002-0086-0012 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Kodak Building 81 South - Upgrade Exhaust Systems Final Technical Report Supporting & Related Material Report 2007-01-29T05:00:00Z 2007 1     2011-06-11T15:59:05Z   0 0 09000064801d4454
EPA-HQ-OAR-2002-0086-0009 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Proposed Rule Federal Register Document 2006-10-19T12:20:00Z 2006 10 2006-10-19T12:20:00Z 2006-12-05T04:59:59Z 2011-06-11T15:59:06Z E6-17224 0 0 09000064801d73c6
EPA-HQ-OAR-2002-0086-0002 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Supporting Statement - ICR No. 2042.02, OMB No. 2060-New Collection Supporting & Related Material Other 2003-02-28T05:00:00Z 2003 2     2006-09-02T14:12:29Z   0 0 09000064800bac95
EPA-HQ-OAR-2002-0086-0003 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Supporting Tables - ICR No. 2042.02, OMB No. 2060-New Collection Supporting & Related Material Other 2003-02-28T05:00:00Z 2003 2     2006-09-02T14:12:29Z   0 0 09000064800bac9c
EPA-HQ-OAR-2002-0086-0008 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Memorandum to John Schaefer, USEPA from David Hendricks, EC/R Incorporated re: Revised MACT Floor Recommendations for Process Vents for the Semiconductor Manufacturing Source Category in Response to Comments Received on the Proposed Rule [A-97-15 II-A-9] Supporting & Related Material Other 2003-02-28T05:00:00Z 2003 2     2006-09-02T14:12:30Z   0 0 09000064800bacbc
EPA-HQ-OAR-2002-0086-0001 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 OMB 83-I Form - ICR No. 2042.02, OMB No. 2060-New Collection Supporting & Related Material Office of Management and Budget (OMB) 2003-02-28T05:00:00Z 2003 2     2006-09-02T14:12:29Z   0 0 09000064800bac90
EPA-HQ-OAR-2002-0086-0005 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Legacy Index for Docket A-97-15 Supporting & Related Material Index 2002-07-08T04:00:00Z 2002 7     2020-11-12T17:22:02Z   0 0 09000064800bacaa
EPA-HQ-OAR-2002-0086-0007 EPA National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Legacy Docket ID #: A-97-15 EPA-HQ-OAR-2002-0086 Memorandum to John Schaefer, USEPA from David Hendricks, EC/R Incorporated re: MACT Floor Recommendation for the Semiconductor Manufacturing Source Category [A-97-15 II-A-7] Supporting & Related Material Other 2001-10-11T04:00:00Z 2001 10     2006-09-02T14:12:30Z   0 0 09000064800bacb6

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CREATE TABLE documents (
    id TEXT PRIMARY KEY,
    agency_id TEXT,
    docket_id TEXT REFERENCES dockets(id),
    title TEXT,
    document_type TEXT,
    subtype TEXT,
    posted_date TEXT,
    posted_year INTEGER,
    posted_month INTEGER,
    comment_start_date TEXT,
    comment_end_date TEXT,
    last_modified TEXT,
    fr_doc_num TEXT,
    open_for_comment INTEGER,
    withdrawn INTEGER,
    object_id TEXT
);
CREATE INDEX idx_docs_agency ON documents(agency_id);
CREATE INDEX idx_docs_docket ON documents(docket_id);
CREATE INDEX idx_docs_date ON documents(posted_date);
CREATE INDEX idx_docs_year ON documents(posted_year);
CREATE INDEX idx_docs_type ON documents(document_type);
CREATE INDEX idx_docs_frnum ON documents(fr_doc_num);
CREATE INDEX idx_docs_comment_end ON documents(comment_end_date) WHERE comment_end_date IS NOT NULL AND withdrawn = 0;
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