{"database": "openregs", "table": "documents", "is_view": false, "human_description_en": "where agency_id = \"EPA\" and docket_id = \"EPA-HQ-OAR-2002-0086\" sorted by posted_date descending", "rows": [["EPA-HQ-OAR-2002-0086-0186", "EPA", "EPA-HQ-OAR-2002-0086", "Intel Corporation to the U.S. EPA, Total Environmental Performance Comparison of VOC Control Technologies: Case Study [A-97-15-II-D-16]", "Supporting & Related Material", "Study", "2023-12-11T05:00:00Z", 2023, 12, null, null, "2023-12-11T19:11:40Z", null, 0, 0, "0900006484189b0b"], ["EPA-HQ-OAR-2002-0086-0164", "EPA", "EPA-HQ-OAR-2002-0086", "Jo Ann Kerrick, ViGYAN, to David Markwordt, U.S. EPA. EPA and Semiconductor Industry Meeting Held December 14, 1995 [A-97-15-II-E-1]", "Supporting & Related Material", "Memorandum", "2022-09-19T04:00:00Z", 2022, 9, null, null, "2022-09-19T19:04:39Z", null, 0, 0, "090000648495aa1e"], ["EPA-HQ-OAR-2002-0086-0160", "EPA", "EPA-HQ-OAR-2002-0086", "State of Missouri Department of Natural Resources to the U.S. EPA, Emissions Inventory Questionnaire, MEMC-St.Peters Plant, dated 4/2/98  [A-97-15-II-D-89]", "Supporting & Related Material", "Form", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:44Z", null, 0, 0, "0900006484189b3c"], ["EPA-HQ-OAR-2002-0086-0131", "EPA", "EPA-HQ-OAR-2002-0086", "Oregon Department of Environmental Quality to the U.S. EPA, Fujitsu\nMicroelectronics, Inc., Permit Application No.016081 dated 6/11/97 [A-97-15-II-D-74]", "Supporting & Related Material", "Permit, Registration", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:19Z", null, 0, 0, "090000648407e9ef"], ["EPA-HQ-OAR-2002-0086-0142", "EPA", "EPA-HQ-OAR-2002-0086", "Texas Instruments to U.S. EPA, transmittal of December 1994 Facility Emissions.   [A-97-15-II-D-38]", "Supporting & Related Material", "Data", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:29Z", null, 0, 0, "0900006484189b0e"], ["EPA-HQ-OAR-2002-0086-0121", "EPA", "EPA-HQ-OAR-2002-0086", "Agenda for Teleconference with EPA and Stakeholders regarding status of the semiconductor manufacturing NESHAP. July 7, 1998. [A-97-15-II-E-8]", "Supporting & Related Material", "Meeting Materials", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:10Z", null, 0, 0, "090000648407d42e"], ["EPA-HQ-OAR-2002-0086-0155", "EPA", "EPA-HQ-OAR-2002-0086", "Oregon Department of Environmental Quality to the U.S. EPA, memorandum dated 3/4/96 from David Sellers to Files regarding semiconductor VOC losses. [A-97-15-II-D-52]", "Supporting & Related Material", "Memorandum", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:40Z", null, 0, 0, "0900006484189b37"], ["EPA-HQ-OAR-2002-0086-0123", "EPA", "EPA-HQ-OAR-2002-0086", "David Hendricks, EC/R Incorporated, to John Schaefer, U.S. EPA/OCG.\nSummary of the February 1, 2001, Semiconductor NESHAP Stakeholder Meeting. [A-97-15-II-E-10]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:11Z", null, 0, 0, "090000648407d430"], ["EPA-HQ-OAR-2002-0086-0162", "EPA", "EPA-HQ-OAR-2002-0086", "Petition to remove semiconductor manufacturing from the list of major source categories pursuant to section 112(c) of the clean air act and section 552(e) of the administrative procedure act. [A-97-15-II-D-103]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:46Z", null, 0, 0, "0900006484189b3e"], ["EPA-HQ-OAR-2002-0086-0115", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PPSG. Summary of July 22, 1997 Meeting with the Semiconductor Industry Association. [A-97-15-II-E-2]", "Supporting & Related Material", "Memorandum", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:04Z", null, 0, 0, "090000648407d428"], ["EPA-HQ-OAR-2002-0086-0163", "EPA", "EPA-HQ-OAR-2002-0086", "J.A. Hatcher, Counsel, Latham & Watkins, Washington, D.C. on behalf of the Semiconductor Industry Association (SIA), San Jose, CA  [A-97-15-IV-D-4]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:47Z", null, 0, 0, "0900006484189b3f"], ["EPA-HQ-OAR-2002-0086-0127", "EPA", "EPA-HQ-OAR-2002-0086", "Timothy G. Higgs, P.E., Emissions Estimation for a Semiconductor Manufacturing Facility, Presented at the Emission Inventory: Key to\nPlanning, Permits, Compliance and Reporting Conference. Air and Waste Management Association; New Orleans, Louisiana, September 4-6, 1996. [A-97-15-II-I-3]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:16Z", null, 0, 0, "090000648407d434"], ["EPA-HQ-OAR-2002-0086-0108", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PPSG. Relationship of Preferred and Alternative Methods for Estimating Air Emissions from Semiconductor Manufacturing to the Semiconductor NESHAP. [A-97-15-II-B-4]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:58Z", null, 0, 0, "090000648407d421"], ["EPA-HQ-OAR-2002-0086-0149", "EPA", "EPA-HQ-OAR-2002-0086", "Texas Natural Resource Conservation Commission to the U.S. EPA, Hitachi, Irving, Dallas Technical Review [A-97-15-II-D-45]", "Supporting & Related Material", "Technical Support Document", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:35Z", null, 0, 0, "0900006484189b31"], ["EPA-HQ-OAR-2002-0086-0106", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PPSG. Permit Status of MEMC Electronic Materials, Inc. in St. Peters, Missouri. [A-97-15-II-B-1]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:57Z", null, 0, 0, "090000648407d41f"], ["EPA-HQ-OAR-2002-0086-0103", "EPA", "EPA-HQ-OAR-2002-0086", "Lesley Fritz and David Hendricks, EC/R Incorporated to Keith Barnett, U.S. EPA. MACT Floor Recommendation for Storage Tanks for the Semiconductor Manufacturing Source Category. [A-97-15-II-A-8]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:54Z", null, 0, 0, "090000648407d41c"], ["EPA-HQ-OAR-2002-0086-0113", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, Sanford Consulting, to Victoria Hsu, Texas Natural Resource Conservation Commission, Request for information. [A-97-15-II-C-3]", "Supporting & Related Material", "E-mail", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:03Z", null, 0, 0, "090000648407d426"], ["EPA-HQ-OAR-2002-0086-0097", "EPA", "EPA-HQ-OAR-2002-0086", "Jo Ann Kerrick, ViGYAN, to David Markwordt, U.S. EPA, transmittal of report characterizing the semiconductor industry HAP emissions. [A-97-15-II-A-1]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:48Z", null, 0, 0, "090000648407d3f1"], ["EPA-HQ-OAR-2002-0086-0124", "EPA", "EPA-HQ-OAR-2002-0086", "Motorola, Inc. to U.S. EPA, Source Emissions Summary MOS 21 Scrubber System, Mesa, AZ. [A-97-15-II-D-91]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:12Z", null, 0, 0, "090000648407d431"], ["EPA-HQ-OAR-2002-0086-0139", "EPA", "EPA-HQ-OAR-2002-0086", "From Air Pollution Control, Vermont Agency of Natural Resources. Source Permit Modification for the IBM Microelectronics Facility in Essex Junction and Williston, Vermont.  [A-97-15-II-D-93]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:26Z", null, 0, 0, "090000648407f758"], ["EPA-HQ-OAR-2002-0086-0100", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, ViGYAN/Indus Corporation, to Tony Wayne, U.S. EPA, transmittal of Draft Presumptive MACT for the Semiconductor Manufacturing Industry. [A-97-15-II-A-4]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:51Z", null, 0, 0, "090000648407d3f4"], ["EPA-HQ-OAR-2002-0086-0104", "EPA", "EPA-HQ-OAR-2002-0086", "David Hendricks and Shannon Ogren, EC/R Incorporated, to John Schaefer, EPA/OAQPS/ESD/OCG. Revised MACT Floor Recommendations for Storage Tanks for the Semiconductor Manufacturing Source Category in Response to Comments Received on the Proposed Rule. [A-97-15-II-A-10]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:55Z", null, 0, 0, "090000648407d41d"], ["EPA-HQ-OAR-2002-0086-0119", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, memorandum of EPA/EPA/Semiconductor Industry Association Teleconference on January 28, 1998. [A-97-15-II-E-6]", "Supporting & Related Material", "Memorandum", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:08Z", null, 0, 0, "090000648407d42c"], ["EPA-HQ-OAR-2002-0086-0105", "EPA", "EPA-HQ-OAR-2002-0086", "David Hendricks, EC/R Incorporated, to Semiconductor NESHAP Project File. Background Information for Evaluating Alternatives More Stringent Than the MACT Floor for Storage Tanks. [A-97-15-II-A-11]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:56Z", null, 0, 0, "090000648407d41e"], ["EPA-HQ-OAR-2002-0086-0109", "EPA", "EPA-HQ-OAR-2002-0086", "John Schaefer, USEPA/OAQPS/ESD/OCG to Semiconductor docket. Site visit report for Eastman Kodak Company, Rochester, NY. [A-97-15-II-B-5]", "Supporting & Related Material", "Memorandum", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:59Z", null, 0, 0, "090000648407d422"], ["EPA-HQ-OAR-2002-0086-0145", "EPA", "EPA-HQ-OAR-2002-0086", "Steve Jones, South Coast Air Quality Management District, to Kathleen Boyle, ViGYAN transmittal of semiconductor regulations. [A-97-15-II-D-41]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:31Z", null, 0, 0, "0900006484189b11"], ["EPA-HQ-OAR-2002-0086-0128", "EPA", "EPA-HQ-OAR-2002-0086", "Semiconductor Industry Association Pollution Prevention & Waste Minimization Program, Report of EPA Toxic Release Inventory (TRI) Data for US Semiconductor Industry 1994, November 1996. [A-97-15-II-I-4]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:16Z", null, 0, 0, "090000648407d435"], ["EPA-HQ-OAR-2002-0086-0129", "EPA", "EPA-HQ-OAR-2002-0086", "Kirk-Othmer Encyclopedia of Chemical Technology, Fourth Edition, Recycling, Oil to Silicon, Volume 21, 1997 [A-97-15-II-I-5]", "Supporting & Related Material", "Publication - Copyrighted Materials", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:17Z", null, 0, 0, "090000648407d436"], ["EPA-HQ-OAR-2002-0086-0156", "EPA", "EPA-HQ-OAR-2002-0086", "South Coast Air Quality Management District to the U.S. EPA, Rockwell\nInternational, Permit to Construct (Ref. Only) [A-97-15-II-D-27]", "Supporting & Related Material", "Application", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:41Z", null, 0, 0, "0900006484189b38"], ["EPA-HQ-OAR-2002-0086-0146", "EPA", "EPA-HQ-OAR-2002-0086", "Alexander Santos, California Air Resources Board, to Kathleen Boyle, ViGYAN transmittal of Bay Area Air Quality Management District...  [A-97-15-II-D-42]", "Supporting & Related Material", "Memorandum", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:32Z", null, 0, 0, "0900006484189b12"], ["EPA-HQ-OAR-2002-0086-0157", "EPA", "EPA-HQ-OAR-2002-0086", "Julia A. Hatcher, Latham & Watkins Attorneys at Law, to the U.S. EPA, March 1, 1996 transmittal of 'Presumptive MACT Guidance for the Semiconductor Industry Source ' Category-Technical, Legal and Policy Considerations.\" [A-97-15-II-D-50]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:42Z", null, 0, 0, "0900006484189b39"], ["EPA-HQ-OAR-2002-0086-0125", "EPA", "EPA-HQ-OAR-2002-0086", "John J. McKetta, Encyclopedia of Chemical Processing and Design, Chapter 49, Safety, OSHA Compliance to Separators, Vertical, Sizing with Computers, 1994 [A-97-15-II-I-1]", "Supporting & Related Material", "Publication - Copyrighted Materials", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:13Z", null, 0, 0, "090000648407d432"], ["EPA-HQ-OAR-2002-0086-0120", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, memorandum of EPA/EPA/Semiconductor Industry Association MACT Meeting on February 18, 1998. [A-97-15-II-E-7]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:09Z", null, 0, 0, "090000648407d42d"], ["EPA-HQ-OAR-2002-0086-0153", "EPA", "EPA-HQ-OAR-2002-0086", "State of Missouri, Department of Natural Resources to the U.S. EPA, transmittal of Permit to Construct, MEMC Electronic Materials, Inc., Permit No.1195-016A. [A-97-15-II-D-49]", "Supporting & Related Material", "Permit, Registration", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:38Z", null, 0, 0, "0900006484189b35"], ["EPA-HQ-OAR-2002-0086-0130", "EPA", "EPA-HQ-OAR-2002-0086", "Maricopa County Environmental Community Services Agency to the U.S. EPA, transmittal of Significant Permit Revision No. S96-029,Air Quality Permit No. 8602974 [A-97-15-II-D-70]", "Supporting & Related Material", "Permit, Registration", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:18Z", null, 0, 0, "090000648407e9ec"], ["EPA-HQ-OAR-2002-0086-0107", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, Sanford Consulting, to Tony Wayne, U.S. EPA, Site Visit Report for Motorola McDowell Road Facility. [A-97-15-II-B-2]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:57Z", null, 0, 0, "090000648407d420"], ["EPA-HQ-OAR-2002-0086-0140", "EPA", "EPA-HQ-OAR-2002-0086", "Intel Corporation to the U.S. EPA, \"Total Environmental Performance Comparison of VOC Control Technologies: Case Study.\" [A-97-15-II-D-16]", "Supporting & Related Material", "Study", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:27Z", null, 0, 0, "0900006484189b0c"], ["EPA-HQ-OAR-2002-0086-0135", "EPA", "EPA-HQ-OAR-2002-0086", "Kodak Building 81 South Upgrade Exhaust Systems Final Technical Report [A-97-15-II-D-104]", "Supporting & Related Material", "Publication - Copyrighted Materials", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:22Z", null, 0, 0, "090000648407ea07"], ["EPA-HQ-OAR-2002-0086-0110", "EPA", "EPA-HQ-OAR-2002-0086", "Frederick J. Thompson, USEPA/OAQPS/ESD/SMAG, to Penny Lassiter, USEPA/OAQPS/ESD/OCG. Voluntary Consensus Standard Results for the Semiconductor Manufacturing NESHAP Final Rule. [A-97-15-II-B-6]", "Supporting & Related Material", "Memorandum", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:00Z", null, 0, 0, "090000648407d423"], ["EPA-HQ-OAR-2002-0086-0098", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, ViGYAN, to David Markwordt, U.S. EPA, transmittal of memorandum regarding control technique costs. [A-97-15-II-A-2]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:49Z", null, 0, 0, "090000648407d3f2"], ["EPA-HQ-OAR-2002-0086-0143", "EPA", "EPA-HQ-OAR-2002-0086", "Motorola, Inc. to the U.S. EPA, Chandler, Arizona, Stack Emissions and Efficiency Tests. [A-97-15-II-D-39]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:29Z", null, 0, 0, "0900006484189b0f"], ["EPA-HQ-OAR-2002-0086-0122", "EPA", "EPA-HQ-OAR-2002-0086", "David Hendricks and Karen Holmes, EC/R Incorporated, and Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, Summary of June 16 and 17, 1998 Semiconductor Manufacturing NESHAP Roundtable Meeting. [A-97-15-II-E-9]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:11Z", null, 0, 0, "090000648407d42f"], ["EPA-HQ-OAR-2002-0086-0144", "EPA", "EPA-HQ-OAR-2002-0086", "Oregon Department of Environmental Quality to the U.S. EPA, transmittal of Draft Oregon Title V Operating Permit Application Review Report, Intel Corporation, Permit No. 34-2681. [A-97-15-II-D-40]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:30Z", null, 0, 0, "0900006484189b10"], ["EPA-HQ-OAR-2002-0086-0118", "EPA", "EPA-HQ-OAR-2002-0086", "Jack P. Broadbent, South Coast Air Quality Management District to Wally Sanford, Sanford Consulting email regarding EPA contact. [A-97-15-II-E-5]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:07Z", null, 0, 0, "090000648407d42b"], ["EPA-HQ-OAR-2002-0086-0134", "EPA", "EPA-HQ-OAR-2002-0086", "Comment submitted by Point Sources Committee Emission Inventory Improvement Program [A-97-15-II-D-94]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:21Z", null, 0, 0, "090000648407e9ff"], ["EPA-HQ-OAR-2002-0086-0159", "EPA", "EPA-HQ-OAR-2002-0086", "STAPPA/ALAPCO/EPA Emission Inventory Improvement Program to the U.S. EPA, \"Review Draft of Preferred and Alternative Methods for Estimating Air Emissions from Semiconductor Manufacturing  \n[A-97-15-II-D-72]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:43Z", null, 0, 0, "0900006484189b3b"], ["EPA-HQ-OAR-2002-0086-0099", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, ViGYAN, to Tony Wayne, U.S. EPA, memorandum regarding review of semiconductor permits. [A-97-15-II-A-3]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:50Z", null, 0, 0, "090000648407d3f3"], ["EPA-HQ-OAR-2002-0086-0147", "EPA", "EPA-HQ-OAR-2002-0086", "Intel Corporation to the U.S. EPA, Rio Rancho, New Mexico, \"Acid Gas and Chlorine Determination from Representative Scrubbed Gas Systems,\" Appendix J. [A-97-15-II-D-43]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:33Z", null, 0, 0, "0900006484189b2f"], ["EPA-HQ-OAR-2002-0086-0102", "EPA", "EPA-HQ-OAR-2002-0086", "David Hendricks, EC/R Incorporated to Tony Wayne, U.S. EPA, transmittal of Justification for Including Research and Development Operations in the Semiconductor NESHAP memorandum. [A-97-15-II-A-6]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:53Z", null, 0, 0, "090000648407d41b"], ["EPA-HQ-OAR-2002-0086-0112", "EPA", "EPA-HQ-OAR-2002-0086", "Mr. Tony Wayne, U.S. EPA to Mr. Lee Neal, Semiconductor Industry Association transmittal of letter regarding February 1998 Technical Meeting. [A-97-15-II-C-2]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:02Z", null, 0, 0, "090000648407d425"], ["EPA-HQ-OAR-2002-0086-0126", "EPA", "EPA-HQ-OAR-2002-0086", "Sandy Webb and John Hoeri, Use of Hazardous Air Pollutants in Semiconductor Manufacturing, SSA Journal, 1995. [A-97-15-II-I-2]", "Supporting & Related Material", "Publication - Copyrighted Materials", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:14Z", null, 0, 0, "090000648407d433"], ["EPA-HQ-OAR-2002-0086-0152", "EPA", "EPA-HQ-OAR-2002-0086", "Semiconductor Industry  Association, to David Beck, David Markwordt, and Anthony Wayne, U.S. EPA, transmittal of letter regarding Presumptive MACT for the Semiconductor Industry.  [A-97-15-II-D-48]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:37Z", null, 0, 0, "0900006484189b34"], ["EPA-HQ-OAR-2002-0086-0132", "EPA", "EPA-HQ-OAR-2002-0086", "Comment submitted by Berhanu A. Getahun, Environmental Engineer, State of Missouri, Department of Natural Resources [A-97-15-II-D-78]", "Supporting & Related Material", "Permit, Registration", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:20Z", null, 0, 0, "090000648407e9f3"], ["EPA-HQ-OAR-2002-0086-0150", "EPA", "EPA-HQ-OAR-2002-0086", "Motorola, Inc. to the U.S. EPA, Compliance Source Test Report, Phoenix, AZ, Thermal Oxidizer at COM-1. [A-97-15-II-D-46]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:35Z", null, 0, 0, "0900006484189b32"], ["EPA-HQ-OAR-2002-0086-0136", "EPA", "EPA-HQ-OAR-2002-0086", "Memorandum: List of Facility ID Codes for SIA's MACT3 Survey, dated September 23, 1998. (CBI) [A-97-15-II-D-105]", "Supporting & Related Material", "Memorandum", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:23Z", null, 0, 0, "090000648407ea08"], ["EPA-HQ-OAR-2002-0086-0158", "EPA", "EPA-HQ-OAR-2002-0086", "From Air Pollution Control, Vermont Agency of Natural Resources. Operating Permit Application for the IBM Microelectronics Facility in\nEssex Junction, Vermont.  [A-97-15-II-D-53]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:43Z", null, 0, 0, "0900006484189b3a"], ["EPA-HQ-OAR-2002-0086-0116", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PSG. Summary of September 9, 1997 Meeting with the Semiconductor Industry Association. [A-97-15-II-E-3]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:05Z", null, 0, 0, "090000648407d429"], ["EPA-HQ-OAR-2002-0086-0138", "EPA", "EPA-HQ-OAR-2002-0086", "J. Michael Sherer, Motorola to Susan Wyatt, U.S. EPA, transmittal of comments on the trip report dated April 27, 1998. [A-97-15-II-D-92]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:25Z", null, 0, 0, "090000648407f757"], ["EPA-HQ-OAR-2002-0086-0151", "EPA", "EPA-HQ-OAR-2002-0086", "Motorola, Inc. to the U.S. EPA, Compliance Source Test Report, Phoenix, AZ, Thermal Oxidizer at P Building. [A-97-15-II-D-47]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:36Z", null, 0, 0, "0900006484189b33"], ["EPA-HQ-OAR-2002-0086-0111", "EPA", "EPA-HQ-OAR-2002-0086", "Mr. Tony Wayne, U.S. EPA to Mr. Lee Neal, Semiconductor Industry Association transmittal of letter regarding Final Presumptive MACT. [A-97-15-II-C-1]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:01Z", null, 0, 0, "090000648407d424"], ["EPA-HQ-OAR-2002-0086-0114", "EPA", "EPA-HQ-OAR-2002-0086", "Mr. Tony Wayne, U.S. EPA to Mr. Lee Neal, Semiconductor industry association transmittal of letter indicating initial MACT Floor findings. [A-97-15-II-C-4]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:04Z", null, 0, 0, "090000648407d427"], ["EPA-HQ-OAR-2002-0086-0154", "EPA", "EPA-HQ-OAR-2002-0086", "Julia A. Hatcher, Latham & Watkins Attorneys at Law, to David Beck, David Markwordt, and Anthony Wayne, U.S. EPA, transmittal of letter regarding Presumptive MACT for the Semiconductor Industry [A-97-15-II-D-51]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:39Z", null, 0, 0, "0900006484189b36"], ["EPA-HQ-OAR-2002-0086-0148", "EPA", "EPA-HQ-OAR-2002-0086", "Oregon Department of Environmental Quality to the U.S. EPA, Wacker Siltronic Corporation, Permit Application No.014947 dated 10/11/95.  \n[A-97-15-II-D-44]", "Supporting & Related Material", "Permit, Registration", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:34Z", null, 0, 0, "0900006484189b30"], ["EPA-HQ-OAR-2002-0086-0137", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, Sanford Consulting, to Tony Wayne, U.S. EPA, Site Visit Report for Intel Facility, Chandler, AZ. (CBI) [A-97-15-II-B-3]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:24Z", null, 0, 0, "090000648407f756"], ["EPA-HQ-OAR-2002-0086-0133", "EPA", "EPA-HQ-OAR-2002-0086", "Maricopa County Environmental Services Department, to U.S. EPA, transmittal of facility air quality permits [A-97-15-II-D-82]", "Supporting & Related Material", "Permit, Registration", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:21Z", null, 0, 0, "090000648407e9f7"], ["EPA-HQ-OAR-2002-0086-0117", "EPA", "EPA-HQ-OAR-2002-0086", "Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, memorandum of EPA/Semiconductor Industry Association Meeting on December 18, 1997.[A-97-15-II-E-4]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:06Z", null, 0, 0, "090000648407d42a"], ["EPA-HQ-OAR-2002-0086-0141", "EPA", "EPA-HQ-OAR-2002-0086", "State of New Mexico, Air Quality Bureau to the U.S. EPA, Permit No. 325-M-8,Intel Corporation, Rio Rancho Facility dated 1/17/95.  [A-97-15-II-D-37]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:28Z", null, 0, 0, "0900006484189b0d"], ["EPA-HQ-OAR-2002-0086-0101", "EPA", "EPA-HQ-OAR-2002-0086", "David Hendricks, EC/R Incorporated to Tony Wayne, U.S. EPA, transmittal of Definition of Source Category, Definition of Affected Source, and Subcategorization Issues for the Semiconductor NESHAP Project memorandum. [A-97-15-II-A-5]", "Supporting & Related Material", "Letter", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:40:52Z", null, 0, 0, "090000648407d3f5"], ["EPA-HQ-OAR-2002-0086-0161", "EPA", "EPA-HQ-OAR-2002-0086", "SIA to U.S. EPA, transmittal of MACT 3 Survey Results from facilities 1819A, 1932A, 3493, 3719A, 3786, 3912A, 4434, 532121, 6103A, 6347A, 6393, 6412, 6786A, 8121A, 8366, and 8718A. [A-97-15-II-D-95]", "Supporting & Related Material", "Report", "2020-03-11T04:00:00Z", 2020, 3, null, null, "2020-03-11T15:41:45Z", null, 0, 0, "0900006484189b3d"], ["EPA-HQ-OAR-2002-0086-0019", "EPA", "EPA-HQ-OAR-2002-0086", "A-97-15-F-R-MAY-8-2002\nNational Emission Standards for Hazardous Air Pollutants: Semiconductor Manufacturing", "Proposed Rule", "Notice of Proposed Rulemaking (NPRM)", "2019-10-10T04:00:00Z", 2019, 10, "2019-10-10T04:00:00Z", "2002-07-09T03:59:59Z", "2019-10-10T18:26:50Z", "02-11298", 0, 0, "090000648407d37a"], ["EPA-HQ-OAR-2002-0086-0017", "EPA", "EPA-HQ-OAR-2002-0086", "National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing", "Rule", "Federal Register Document", "2008-07-22T04:00:00Z", 2008, 7, null, null, "2011-06-11T15:59:06Z", "E8-16746", 0, 0, "090000648068c597"], ["EPA-HQ-OAR-2002-0086-0018", "EPA", "EPA-HQ-OAR-2002-0086", "National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Final Rule, Response to Comments", "Supporting & Related Material", "Comment Response", "2008-07-22T04:00:00Z", 2008, 7, null, null, "2008-07-22T12:02:09Z", null, 0, 0, "090000648068a3cc"], ["EPA-HQ-OAR-2002-0086-0014", "EPA", "EPA-HQ-OAR-2002-0086", "Memorandum to docket, Subject - Combined Hazardous Air Pollutant (HAP) Process Vent Maximum Achievable Control Technology (MACT) Floor for Semiconductor Maximum Achievable Control Technology (MACT) Supplemental Proposal (August 17, 2007)", "Supporting & Related Material", "Letter, Memorandum, Email", "2008-04-02T04:00:00Z", 2008, 4, null, null, "2008-04-02T18:17:27Z", null, 0, 0, "09000064803e87d7"], ["EPA-HQ-OAR-2002-0086-0015", "EPA", "EPA-HQ-OAR-2002-0086", "National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing - Office of Management and Budget (OMB) Review", "Supporting & Related Material", "Federal Register Document", "2008-04-02T04:00:00Z", 2008, 4, null, null, "2011-06-11T15:59:05Z", null, 0, 0, "09000064803e881e"], ["EPA-HQ-OAR-2002-0086-0013", "EPA", "EPA-HQ-OAR-2002-0086", "National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing", "Proposed Rule", "Federal Register Document", "2008-04-02T04:00:00Z", 2008, 4, "2008-04-02T04:00:00Z", "2008-05-03T03:59:59Z", "2011-06-11T15:59:05Z", "E8-06816", 0, 0, "0900006480427512"], ["EPA-HQ-OAR-2002-0086-0006", "EPA", "EPA-HQ-OAR-2002-0086", "National Emission Standards for Hazardous Air Pollutants (NESHAP): Semiconductor Manufacturing - Summary of Public Comments and Responses on Proposed Rule [A-97-15 II-A-12]", "Supporting & Related Material", "Comment Response", "2008-02-02T13:16:35Z", 2008, 2, null, null, "2006-09-02T14:12:29Z", null, 0, 0, "09000064800bacb0"], ["EPA-HQ-OAR-2002-0086-0012", "EPA", "EPA-HQ-OAR-2002-0086", "Kodak Building 81 South - Upgrade Exhaust Systems Final Technical Report", "Supporting & Related Material", "Report", "2007-01-29T05:00:00Z", 2007, 1, null, null, "2011-06-11T15:59:05Z", null, 0, 0, "09000064801d4454"], ["EPA-HQ-OAR-2002-0086-0009", "EPA", "EPA-HQ-OAR-2002-0086", "National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing", "Proposed Rule", "Federal Register Document", "2006-10-19T12:20:00Z", 2006, 10, "2006-10-19T12:20:00Z", "2006-12-05T04:59:59Z", "2011-06-11T15:59:06Z", "E6-17224", 0, 0, "09000064801d73c6"], ["EPA-HQ-OAR-2002-0086-0002", "EPA", "EPA-HQ-OAR-2002-0086", "Supporting Statement - ICR No. 2042.02, OMB No. 2060-New Collection", "Supporting & Related Material", "Other", "2003-02-28T05:00:00Z", 2003, 2, null, null, "2006-09-02T14:12:29Z", null, 0, 0, "09000064800bac95"], ["EPA-HQ-OAR-2002-0086-0003", "EPA", "EPA-HQ-OAR-2002-0086", "Supporting Tables - ICR No. 2042.02, OMB No. 2060-New Collection", "Supporting & Related Material", "Other", "2003-02-28T05:00:00Z", 2003, 2, null, null, "2006-09-02T14:12:29Z", null, 0, 0, "09000064800bac9c"], ["EPA-HQ-OAR-2002-0086-0008", "EPA", "EPA-HQ-OAR-2002-0086", "Memorandum to John Schaefer, USEPA from David Hendricks, EC/R Incorporated re: Revised MACT Floor Recommendations for Process Vents for the Semiconductor Manufacturing Source Category in Response to Comments Received on the Proposed Rule [A-97-15 II-A-9]", "Supporting & Related Material", "Other", "2003-02-28T05:00:00Z", 2003, 2, null, null, "2006-09-02T14:12:30Z", null, 0, 0, "09000064800bacbc"], ["EPA-HQ-OAR-2002-0086-0001", "EPA", "EPA-HQ-OAR-2002-0086", "OMB 83-I Form - ICR No. 2042.02, OMB No. 2060-New Collection", "Supporting & Related Material", "Office of Management and Budget (OMB)", "2003-02-28T05:00:00Z", 2003, 2, null, null, "2006-09-02T14:12:29Z", null, 0, 0, "09000064800bac90"], ["EPA-HQ-OAR-2002-0086-0005", "EPA", "EPA-HQ-OAR-2002-0086", "Legacy Index for Docket A-97-15", "Supporting & Related Material", "Index", "2002-07-08T04:00:00Z", 2002, 7, null, null, "2020-11-12T17:22:02Z", null, 0, 0, "09000064800bacaa"], ["EPA-HQ-OAR-2002-0086-0007", "EPA", "EPA-HQ-OAR-2002-0086", "Memorandum to John Schaefer, USEPA from David Hendricks, EC/R Incorporated re: MACT Floor Recommendation for the Semiconductor Manufacturing Source Category [A-97-15 II-A-7]", "Supporting & Related Material", "Other", "2001-10-11T04:00:00Z", 2001, 10, null, null, "2006-09-02T14:12:30Z", null, 0, 0, "09000064800bacb6"]], "truncated": false, "filtered_table_rows_count": 84, "expanded_columns": [], "expandable_columns": [[{"column": "docket_id", "other_table": "dockets", "other_column": "id"}, "title"]], "columns": ["id", "agency_id", "docket_id", "title", "document_type", "subtype", "posted_date", "posted_year", "posted_month", "comment_start_date", "comment_end_date", "last_modified", "fr_doc_num", "open_for_comment", "withdrawn", "object_id"], "primary_keys": ["id"], "units": {}, "query": {"sql": "select id, agency_id, docket_id, title, document_type, subtype, posted_date, posted_year, posted_month, comment_start_date, comment_end_date, last_modified, fr_doc_num, open_for_comment, withdrawn, object_id from documents where \"agency_id\" = :p0 and \"docket_id\" = :p1 order by posted_date desc limit 101", "params": {"p0": "EPA", "p1": "EPA-HQ-OAR-2002-0086"}}, "facet_results": {"agency_id": {"name": "agency_id", "type": "column", "hideable": false, "toggle_url": "/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086", "results": [{"value": "EPA", "label": "EPA", "count": 84, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?docket_id=EPA-HQ-OAR-2002-0086", "selected": true}], "truncated": false}, "document_type": {"name": "document_type", "type": "column", "hideable": false, "toggle_url": "/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086", "results": [{"value": "Supporting & Related Material", "label": "Supporting & Related Material", "count": 80, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&document_type=Supporting+%26+Related+Material", "selected": false}, {"value": "Proposed Rule", "label": "Proposed Rule", "count": 3, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&document_type=Proposed+Rule", "selected": false}, {"value": "Rule", "label": "Rule", "count": 1, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&document_type=Rule", "selected": false}], "truncated": false}, "posted_year": {"name": "posted_year", "type": "column", "hideable": false, "toggle_url": "/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086", "results": [{"value": 2020, "label": 2020, "count": 67, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&posted_year=2020", "selected": false}, {"value": 2008, "label": 2008, "count": 6, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&posted_year=2008", "selected": false}, {"value": 2003, "label": 2003, "count": 4, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&posted_year=2003", "selected": false}, {"value": 2001, "label": 2001, "count": 1, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&posted_year=2001", "selected": false}, {"value": 2002, "label": 2002, "count": 1, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&posted_year=2002", "selected": false}, {"value": 2006, "label": 2006, "count": 1, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&posted_year=2006", "selected": false}, {"value": 2007, "label": 2007, "count": 1, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&posted_year=2007", "selected": false}, {"value": 2019, "label": 2019, "count": 1, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&posted_year=2019", "selected": false}, {"value": 2022, "label": 2022, "count": 1, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&posted_year=2022", "selected": false}, {"value": 2023, "label": 2023, "count": 1, "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&posted_year=2023", "selected": false}], "truncated": false}}, "suggested_facets": [{"name": "subtype", "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&_facet=subtype"}, {"name": "posted_date", "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&_facet=posted_date"}, {"name": "posted_month", "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&_facet=posted_month"}, {"name": "posted_date", "type": "date", "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&_facet_date=posted_date"}, {"name": "comment_start_date", "type": "date", "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&_facet_date=comment_start_date"}, {"name": "comment_end_date", "type": "date", "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&_facet_date=comment_end_date"}, {"name": "last_modified", "type": "date", "toggle_url": "https://regs.datadawn.org/openregs/documents.json?agency_id=EPA&docket_id=EPA-HQ-OAR-2002-0086&_facet_date=last_modified"}], "next": null, "next_url": null, "private": false, "allow_execute_sql": true, "query_ms": 112.9529339959845, "source": "Federal Register API & Regulations.gov API", "source_url": "https://www.federalregister.gov/developers/api/v1", "license": "Public Domain (U.S. Government data)", "license_url": "https://www.regulations.gov/faq"}