id,agency_id,docket_id,title,document_type,subtype,posted_date,posted_year,posted_month,comment_start_date,comment_end_date,last_modified,fr_doc_num,open_for_comment,withdrawn,object_id EPA-HQ-OAR-2002-0086-0017,EPA,EPA-HQ-OAR-2002-0086,National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing,Rule,Federal Register Document,2008-07-22T04:00:00Z,2008,7,,,2011-06-11T15:59:06Z,E8-16746,0,0,090000648068c597 EPA-HQ-OAR-2002-0086-0018,EPA,EPA-HQ-OAR-2002-0086,"National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Final Rule, Response to Comments",Supporting & Related Material,Comment Response,2008-07-22T04:00:00Z,2008,7,,,2008-07-22T12:02:09Z,,0,0,090000648068a3cc EPA-HQ-OAR-2002-0086-0014,EPA,EPA-HQ-OAR-2002-0086,"Memorandum to docket, Subject - Combined Hazardous Air Pollutant (HAP) Process Vent Maximum Achievable Control Technology (MACT) Floor for Semiconductor Maximum Achievable Control Technology (MACT) Supplemental Proposal (August 17, 2007)",Supporting & Related Material,"Letter, Memorandum, Email",2008-04-02T04:00:00Z,2008,4,,,2008-04-02T18:17:27Z,,0,0,09000064803e87d7 EPA-HQ-OAR-2002-0086-0015,EPA,EPA-HQ-OAR-2002-0086,National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing - Office of Management and Budget (OMB) Review,Supporting & Related Material,Federal Register Document,2008-04-02T04:00:00Z,2008,4,,,2011-06-11T15:59:05Z,,0,0,09000064803e881e EPA-HQ-OAR-2002-0086-0013,EPA,EPA-HQ-OAR-2002-0086,National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing,Proposed Rule,Federal Register Document,2008-04-02T04:00:00Z,2008,4,2008-04-02T04:00:00Z,2008-05-03T03:59:59Z,2011-06-11T15:59:05Z,E8-06816,0,0,0900006480427512 EPA-HQ-OAR-2002-0086-0006,EPA,EPA-HQ-OAR-2002-0086,National Emission Standards for Hazardous Air Pollutants (NESHAP): Semiconductor Manufacturing - Summary of Public Comments and Responses on Proposed Rule [A-97-15 II-A-12],Supporting & Related Material,Comment Response,2008-02-02T13:16:35Z,2008,2,,,2006-09-02T14:12:29Z,,0,0,09000064800bacb0