id,agency_id,docket_id,title,document_type,subtype,posted_date,posted_year,posted_month,comment_start_date,comment_end_date,last_modified,fr_doc_num,open_for_comment,withdrawn,object_id EPA-HQ-OAR-2002-0086-0009,EPA,EPA-HQ-OAR-2002-0086,National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing,Proposed Rule,Federal Register Document,2006-10-19T12:20:00Z,2006,10,2006-10-19T12:20:00Z,2006-12-05T04:59:59Z,2011-06-11T15:59:06Z,E6-17224,0,0,09000064801d73c6