id,agency_id,docket_id,title,document_type,subtype,posted_date,posted_year,posted_month,comment_start_date,comment_end_date,last_modified,fr_doc_num,open_for_comment,withdrawn,object_id
EPA-HQ-OAR-2002-0086-0186,EPA,EPA-HQ-OAR-2002-0086,"Intel Corporation to the U.S. EPA, Total Environmental Performance Comparison of VOC Control Technologies: Case Study [A-97-15-II-D-16]",Supporting & Related Material,Study,2023-12-11T05:00:00Z,2023,12,,,2023-12-11T19:11:40Z,,0,0,0900006484189b0b
EPA-HQ-OAR-2002-0086-0164,EPA,EPA-HQ-OAR-2002-0086,"Jo Ann Kerrick, ViGYAN, to David Markwordt, U.S. EPA. EPA and Semiconductor Industry Meeting Held December 14, 1995 [A-97-15-II-E-1]",Supporting & Related Material,Memorandum,2022-09-19T04:00:00Z,2022,9,,,2022-09-19T19:04:39Z,,0,0,090000648495aa1e
EPA-HQ-OAR-2002-0086-0160,EPA,EPA-HQ-OAR-2002-0086,"State of Missouri Department of Natural Resources to the U.S. EPA, Emissions Inventory Questionnaire, MEMC-St.Peters Plant, dated 4/2/98  [A-97-15-II-D-89]",Supporting & Related Material,Form,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:44Z,,0,0,0900006484189b3c
EPA-HQ-OAR-2002-0086-0131,EPA,EPA-HQ-OAR-2002-0086,"Oregon Department of Environmental Quality to the U.S. EPA, Fujitsu
Microelectronics, Inc., Permit Application No.016081 dated 6/11/97 [A-97-15-II-D-74]",Supporting & Related Material,"Permit, Registration",2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:19Z,,0,0,090000648407e9ef
EPA-HQ-OAR-2002-0086-0142,EPA,EPA-HQ-OAR-2002-0086,"Texas Instruments to U.S. EPA, transmittal of December 1994 Facility Emissions.   [A-97-15-II-D-38]",Supporting & Related Material,Data,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:29Z,,0,0,0900006484189b0e
EPA-HQ-OAR-2002-0086-0121,EPA,EPA-HQ-OAR-2002-0086,"Agenda for Teleconference with EPA and Stakeholders regarding status of the semiconductor manufacturing NESHAP. July 7, 1998. [A-97-15-II-E-8]",Supporting & Related Material,Meeting Materials,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:10Z,,0,0,090000648407d42e
EPA-HQ-OAR-2002-0086-0155,EPA,EPA-HQ-OAR-2002-0086,"Oregon Department of Environmental Quality to the U.S. EPA, memorandum dated 3/4/96 from David Sellers to Files regarding semiconductor VOC losses. [A-97-15-II-D-52]",Supporting & Related Material,Memorandum,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:40Z,,0,0,0900006484189b37
EPA-HQ-OAR-2002-0086-0123,EPA,EPA-HQ-OAR-2002-0086,"David Hendricks, EC/R Incorporated, to John Schaefer, U.S. EPA/OCG.
Summary of the February 1, 2001, Semiconductor NESHAP Stakeholder Meeting. [A-97-15-II-E-10]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:11Z,,0,0,090000648407d430
EPA-HQ-OAR-2002-0086-0162,EPA,EPA-HQ-OAR-2002-0086,Petition to remove semiconductor manufacturing from the list of major source categories pursuant to section 112(c) of the clean air act and section 552(e) of the administrative procedure act. [A-97-15-II-D-103],Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:46Z,,0,0,0900006484189b3e
EPA-HQ-OAR-2002-0086-0115,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PPSG. Summary of July 22, 1997 Meeting with the Semiconductor Industry Association. [A-97-15-II-E-2]",Supporting & Related Material,Memorandum,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:04Z,,0,0,090000648407d428
EPA-HQ-OAR-2002-0086-0163,EPA,EPA-HQ-OAR-2002-0086,"J.A. Hatcher, Counsel, Latham & Watkins, Washington, D.C. on behalf of the Semiconductor Industry Association (SIA), San Jose, CA  [A-97-15-IV-D-4]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:47Z,,0,0,0900006484189b3f
EPA-HQ-OAR-2002-0086-0127,EPA,EPA-HQ-OAR-2002-0086,"Timothy G. Higgs, P.E., Emissions Estimation for a Semiconductor Manufacturing Facility, Presented at the Emission Inventory: Key to
Planning, Permits, Compliance and Reporting Conference. Air and Waste Management Association; New Orleans, Louisiana, September 4-6, 1996. [A-97-15-II-I-3]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:16Z,,0,0,090000648407d434
EPA-HQ-OAR-2002-0086-0108,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PPSG. Relationship of Preferred and Alternative Methods for Estimating Air Emissions from Semiconductor Manufacturing to the Semiconductor NESHAP. [A-97-15-II-B-4]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:58Z,,0,0,090000648407d421
EPA-HQ-OAR-2002-0086-0149,EPA,EPA-HQ-OAR-2002-0086,"Texas Natural Resource Conservation Commission to the U.S. EPA, Hitachi, Irving, Dallas Technical Review [A-97-15-II-D-45]",Supporting & Related Material,Technical Support Document,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:35Z,,0,0,0900006484189b31
EPA-HQ-OAR-2002-0086-0106,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PPSG. Permit Status of MEMC Electronic Materials, Inc. in St. Peters, Missouri. [A-97-15-II-B-1]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:57Z,,0,0,090000648407d41f
EPA-HQ-OAR-2002-0086-0103,EPA,EPA-HQ-OAR-2002-0086,"Lesley Fritz and David Hendricks, EC/R Incorporated to Keith Barnett, U.S. EPA. MACT Floor Recommendation for Storage Tanks for the Semiconductor Manufacturing Source Category. [A-97-15-II-A-8]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:54Z,,0,0,090000648407d41c
EPA-HQ-OAR-2002-0086-0113,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, Sanford Consulting, to Victoria Hsu, Texas Natural Resource Conservation Commission, Request for information. [A-97-15-II-C-3]",Supporting & Related Material,E-mail,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:03Z,,0,0,090000648407d426
EPA-HQ-OAR-2002-0086-0097,EPA,EPA-HQ-OAR-2002-0086,"Jo Ann Kerrick, ViGYAN, to David Markwordt, U.S. EPA, transmittal of report characterizing the semiconductor industry HAP emissions. [A-97-15-II-A-1]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:48Z,,0,0,090000648407d3f1
EPA-HQ-OAR-2002-0086-0124,EPA,EPA-HQ-OAR-2002-0086,"Motorola, Inc. to U.S. EPA, Source Emissions Summary MOS 21 Scrubber System, Mesa, AZ. [A-97-15-II-D-91]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:12Z,,0,0,090000648407d431
EPA-HQ-OAR-2002-0086-0139,EPA,EPA-HQ-OAR-2002-0086,"From Air Pollution Control, Vermont Agency of Natural Resources. Source Permit Modification for the IBM Microelectronics Facility in Essex Junction and Williston, Vermont.  [A-97-15-II-D-93]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:26Z,,0,0,090000648407f758
EPA-HQ-OAR-2002-0086-0100,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, ViGYAN/Indus Corporation, to Tony Wayne, U.S. EPA, transmittal of Draft Presumptive MACT for the Semiconductor Manufacturing Industry. [A-97-15-II-A-4]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:51Z,,0,0,090000648407d3f4
EPA-HQ-OAR-2002-0086-0104,EPA,EPA-HQ-OAR-2002-0086,"David Hendricks and Shannon Ogren, EC/R Incorporated, to John Schaefer, EPA/OAQPS/ESD/OCG. Revised MACT Floor Recommendations for Storage Tanks for the Semiconductor Manufacturing Source Category in Response to Comments Received on the Proposed Rule. [A-97-15-II-A-10]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:55Z,,0,0,090000648407d41d
EPA-HQ-OAR-2002-0086-0119,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, memorandum of EPA/EPA/Semiconductor Industry Association Teleconference on January 28, 1998. [A-97-15-II-E-6]",Supporting & Related Material,Memorandum,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:08Z,,0,0,090000648407d42c
EPA-HQ-OAR-2002-0086-0105,EPA,EPA-HQ-OAR-2002-0086,"David Hendricks, EC/R Incorporated, to Semiconductor NESHAP Project File. Background Information for Evaluating Alternatives More Stringent Than the MACT Floor for Storage Tanks. [A-97-15-II-A-11]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:56Z,,0,0,090000648407d41e
EPA-HQ-OAR-2002-0086-0109,EPA,EPA-HQ-OAR-2002-0086,"John Schaefer, USEPA/OAQPS/ESD/OCG to Semiconductor docket. Site visit report for Eastman Kodak Company, Rochester, NY. [A-97-15-II-B-5]",Supporting & Related Material,Memorandum,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:59Z,,0,0,090000648407d422
EPA-HQ-OAR-2002-0086-0145,EPA,EPA-HQ-OAR-2002-0086,"Steve Jones, South Coast Air Quality Management District, to Kathleen Boyle, ViGYAN transmittal of semiconductor regulations. [A-97-15-II-D-41]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:31Z,,0,0,0900006484189b11
EPA-HQ-OAR-2002-0086-0128,EPA,EPA-HQ-OAR-2002-0086,"Semiconductor Industry Association Pollution Prevention & Waste Minimization Program, Report of EPA Toxic Release Inventory (TRI) Data for US Semiconductor Industry 1994, November 1996. [A-97-15-II-I-4]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:16Z,,0,0,090000648407d435
EPA-HQ-OAR-2002-0086-0129,EPA,EPA-HQ-OAR-2002-0086,"Kirk-Othmer Encyclopedia of Chemical Technology, Fourth Edition, Recycling, Oil to Silicon, Volume 21, 1997 [A-97-15-II-I-5]",Supporting & Related Material,Publication - Copyrighted Materials,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:17Z,,0,0,090000648407d436
EPA-HQ-OAR-2002-0086-0156,EPA,EPA-HQ-OAR-2002-0086,"South Coast Air Quality Management District to the U.S. EPA, Rockwell
International, Permit to Construct (Ref. Only) [A-97-15-II-D-27]",Supporting & Related Material,Application,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:41Z,,0,0,0900006484189b38
EPA-HQ-OAR-2002-0086-0146,EPA,EPA-HQ-OAR-2002-0086,"Alexander Santos, California Air Resources Board, to Kathleen Boyle, ViGYAN transmittal of Bay Area Air Quality Management District...  [A-97-15-II-D-42]",Supporting & Related Material,Memorandum,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:32Z,,0,0,0900006484189b12
EPA-HQ-OAR-2002-0086-0157,EPA,EPA-HQ-OAR-2002-0086,"Julia A. Hatcher, Latham & Watkins Attorneys at Law, to the U.S. EPA, March 1, 1996 transmittal of 'Presumptive MACT Guidance for the Semiconductor Industry Source ' Category-Technical, Legal and Policy Considerations."" [A-97-15-II-D-50]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:42Z,,0,0,0900006484189b39
EPA-HQ-OAR-2002-0086-0125,EPA,EPA-HQ-OAR-2002-0086,"John J. McKetta, Encyclopedia of Chemical Processing and Design, Chapter 49, Safety, OSHA Compliance to Separators, Vertical, Sizing with Computers, 1994 [A-97-15-II-I-1]",Supporting & Related Material,Publication - Copyrighted Materials,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:13Z,,0,0,090000648407d432
EPA-HQ-OAR-2002-0086-0120,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, memorandum of EPA/EPA/Semiconductor Industry Association MACT Meeting on February 18, 1998. [A-97-15-II-E-7]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:09Z,,0,0,090000648407d42d
EPA-HQ-OAR-2002-0086-0153,EPA,EPA-HQ-OAR-2002-0086,"State of Missouri, Department of Natural Resources to the U.S. EPA, transmittal of Permit to Construct, MEMC Electronic Materials, Inc., Permit No.1195-016A. [A-97-15-II-D-49]",Supporting & Related Material,"Permit, Registration",2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:38Z,,0,0,0900006484189b35
EPA-HQ-OAR-2002-0086-0130,EPA,EPA-HQ-OAR-2002-0086,"Maricopa County Environmental Community Services Agency to the U.S. EPA, transmittal of Significant Permit Revision No. S96-029,Air Quality Permit No. 8602974 [A-97-15-II-D-70]",Supporting & Related Material,"Permit, Registration",2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:18Z,,0,0,090000648407e9ec
EPA-HQ-OAR-2002-0086-0107,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, Sanford Consulting, to Tony Wayne, U.S. EPA, Site Visit Report for Motorola McDowell Road Facility. [A-97-15-II-B-2]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:57Z,,0,0,090000648407d420
EPA-HQ-OAR-2002-0086-0140,EPA,EPA-HQ-OAR-2002-0086,"Intel Corporation to the U.S. EPA, ""Total Environmental Performance Comparison of VOC Control Technologies: Case Study."" [A-97-15-II-D-16]",Supporting & Related Material,Study,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:27Z,,0,0,0900006484189b0c
EPA-HQ-OAR-2002-0086-0135,EPA,EPA-HQ-OAR-2002-0086,Kodak Building 81 South Upgrade Exhaust Systems Final Technical Report [A-97-15-II-D-104],Supporting & Related Material,Publication - Copyrighted Materials,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:22Z,,0,0,090000648407ea07
EPA-HQ-OAR-2002-0086-0110,EPA,EPA-HQ-OAR-2002-0086,"Frederick J. Thompson, USEPA/OAQPS/ESD/SMAG, to Penny Lassiter, USEPA/OAQPS/ESD/OCG. Voluntary Consensus Standard Results for the Semiconductor Manufacturing NESHAP Final Rule. [A-97-15-II-B-6]",Supporting & Related Material,Memorandum,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:00Z,,0,0,090000648407d423
EPA-HQ-OAR-2002-0086-0098,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, ViGYAN, to David Markwordt, U.S. EPA, transmittal of memorandum regarding control technique costs. [A-97-15-II-A-2]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:49Z,,0,0,090000648407d3f2
EPA-HQ-OAR-2002-0086-0143,EPA,EPA-HQ-OAR-2002-0086,"Motorola, Inc. to the U.S. EPA, Chandler, Arizona, Stack Emissions and Efficiency Tests. [A-97-15-II-D-39]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:29Z,,0,0,0900006484189b0f
EPA-HQ-OAR-2002-0086-0122,EPA,EPA-HQ-OAR-2002-0086,"David Hendricks and Karen Holmes, EC/R Incorporated, and Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, Summary of June 16 and 17, 1998 Semiconductor Manufacturing NESHAP Roundtable Meeting. [A-97-15-II-E-9]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:11Z,,0,0,090000648407d42f
EPA-HQ-OAR-2002-0086-0144,EPA,EPA-HQ-OAR-2002-0086,"Oregon Department of Environmental Quality to the U.S. EPA, transmittal of Draft Oregon Title V Operating Permit Application Review Report, Intel Corporation, Permit No. 34-2681. [A-97-15-II-D-40]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:30Z,,0,0,0900006484189b10
EPA-HQ-OAR-2002-0086-0118,EPA,EPA-HQ-OAR-2002-0086,"Jack P. Broadbent, South Coast Air Quality Management District to Wally Sanford, Sanford Consulting email regarding EPA contact. [A-97-15-II-E-5]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:07Z,,0,0,090000648407d42b
EPA-HQ-OAR-2002-0086-0134,EPA,EPA-HQ-OAR-2002-0086,Comment submitted by Point Sources Committee Emission Inventory Improvement Program [A-97-15-II-D-94],Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:21Z,,0,0,090000648407e9ff
EPA-HQ-OAR-2002-0086-0159,EPA,EPA-HQ-OAR-2002-0086,"STAPPA/ALAPCO/EPA Emission Inventory Improvement Program to the U.S. EPA, ""Review Draft of Preferred and Alternative Methods for Estimating Air Emissions from Semiconductor Manufacturing  
[A-97-15-II-D-72]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:43Z,,0,0,0900006484189b3b
EPA-HQ-OAR-2002-0086-0099,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, ViGYAN, to Tony Wayne, U.S. EPA, memorandum regarding review of semiconductor permits. [A-97-15-II-A-3]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:50Z,,0,0,090000648407d3f3
EPA-HQ-OAR-2002-0086-0147,EPA,EPA-HQ-OAR-2002-0086,"Intel Corporation to the U.S. EPA, Rio Rancho, New Mexico, ""Acid Gas and Chlorine Determination from Representative Scrubbed Gas Systems,"" Appendix J. [A-97-15-II-D-43]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:33Z,,0,0,0900006484189b2f
EPA-HQ-OAR-2002-0086-0102,EPA,EPA-HQ-OAR-2002-0086,"David Hendricks, EC/R Incorporated to Tony Wayne, U.S. EPA, transmittal of Justification for Including Research and Development Operations in the Semiconductor NESHAP memorandum. [A-97-15-II-A-6]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:53Z,,0,0,090000648407d41b
EPA-HQ-OAR-2002-0086-0112,EPA,EPA-HQ-OAR-2002-0086,"Mr. Tony Wayne, U.S. EPA to Mr. Lee Neal, Semiconductor Industry Association transmittal of letter regarding February 1998 Technical Meeting. [A-97-15-II-C-2]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:02Z,,0,0,090000648407d425
EPA-HQ-OAR-2002-0086-0126,EPA,EPA-HQ-OAR-2002-0086,"Sandy Webb and John Hoeri, Use of Hazardous Air Pollutants in Semiconductor Manufacturing, SSA Journal, 1995. [A-97-15-II-I-2]",Supporting & Related Material,Publication - Copyrighted Materials,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:14Z,,0,0,090000648407d433
EPA-HQ-OAR-2002-0086-0152,EPA,EPA-HQ-OAR-2002-0086,"Semiconductor Industry  Association, to David Beck, David Markwordt, and Anthony Wayne, U.S. EPA, transmittal of letter regarding Presumptive MACT for the Semiconductor Industry.  [A-97-15-II-D-48]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:37Z,,0,0,0900006484189b34
EPA-HQ-OAR-2002-0086-0132,EPA,EPA-HQ-OAR-2002-0086,"Comment submitted by Berhanu A. Getahun, Environmental Engineer, State of Missouri, Department of Natural Resources [A-97-15-II-D-78]",Supporting & Related Material,"Permit, Registration",2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:20Z,,0,0,090000648407e9f3
EPA-HQ-OAR-2002-0086-0150,EPA,EPA-HQ-OAR-2002-0086,"Motorola, Inc. to the U.S. EPA, Compliance Source Test Report, Phoenix, AZ, Thermal Oxidizer at COM-1. [A-97-15-II-D-46]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:35Z,,0,0,0900006484189b32
EPA-HQ-OAR-2002-0086-0136,EPA,EPA-HQ-OAR-2002-0086,"Memorandum: List of Facility ID Codes for SIA's MACT3 Survey, dated September 23, 1998. (CBI) [A-97-15-II-D-105]",Supporting & Related Material,Memorandum,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:23Z,,0,0,090000648407ea08
EPA-HQ-OAR-2002-0086-0158,EPA,EPA-HQ-OAR-2002-0086,"From Air Pollution Control, Vermont Agency of Natural Resources. Operating Permit Application for the IBM Microelectronics Facility in
Essex Junction, Vermont.  [A-97-15-II-D-53]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:43Z,,0,0,0900006484189b3a
EPA-HQ-OAR-2002-0086-0116,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, Sanford Consulting, to Tony Wayne, USEPA/OAQPS/ESD/PSG. Summary of September 9, 1997 Meeting with the Semiconductor Industry Association. [A-97-15-II-E-3]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:05Z,,0,0,090000648407d429
EPA-HQ-OAR-2002-0086-0138,EPA,EPA-HQ-OAR-2002-0086,"J. Michael Sherer, Motorola to Susan Wyatt, U.S. EPA, transmittal of comments on the trip report dated April 27, 1998. [A-97-15-II-D-92]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:25Z,,0,0,090000648407f757
EPA-HQ-OAR-2002-0086-0151,EPA,EPA-HQ-OAR-2002-0086,"Motorola, Inc. to the U.S. EPA, Compliance Source Test Report, Phoenix, AZ, Thermal Oxidizer at P Building. [A-97-15-II-D-47]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:36Z,,0,0,0900006484189b33
EPA-HQ-OAR-2002-0086-0111,EPA,EPA-HQ-OAR-2002-0086,"Mr. Tony Wayne, U.S. EPA to Mr. Lee Neal, Semiconductor Industry Association transmittal of letter regarding Final Presumptive MACT. [A-97-15-II-C-1]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:01Z,,0,0,090000648407d424
EPA-HQ-OAR-2002-0086-0114,EPA,EPA-HQ-OAR-2002-0086,"Mr. Tony Wayne, U.S. EPA to Mr. Lee Neal, Semiconductor industry association transmittal of letter indicating initial MACT Floor findings. [A-97-15-II-C-4]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:04Z,,0,0,090000648407d427
EPA-HQ-OAR-2002-0086-0154,EPA,EPA-HQ-OAR-2002-0086,"Julia A. Hatcher, Latham & Watkins Attorneys at Law, to David Beck, David Markwordt, and Anthony Wayne, U.S. EPA, transmittal of letter regarding Presumptive MACT for the Semiconductor Industry [A-97-15-II-D-51]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:39Z,,0,0,0900006484189b36
EPA-HQ-OAR-2002-0086-0148,EPA,EPA-HQ-OAR-2002-0086,"Oregon Department of Environmental Quality to the U.S. EPA, Wacker Siltronic Corporation, Permit Application No.014947 dated 10/11/95.  
[A-97-15-II-D-44]",Supporting & Related Material,"Permit, Registration",2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:34Z,,0,0,0900006484189b30
EPA-HQ-OAR-2002-0086-0137,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, Sanford Consulting, to Tony Wayne, U.S. EPA, Site Visit Report for Intel Facility, Chandler, AZ. (CBI) [A-97-15-II-B-3]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:24Z,,0,0,090000648407f756
EPA-HQ-OAR-2002-0086-0133,EPA,EPA-HQ-OAR-2002-0086,"Maricopa County Environmental Services Department, to U.S. EPA, transmittal of facility air quality permits [A-97-15-II-D-82]",Supporting & Related Material,"Permit, Registration",2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:21Z,,0,0,090000648407e9f7
EPA-HQ-OAR-2002-0086-0117,EPA,EPA-HQ-OAR-2002-0086,"Wally Sanford, Sanford Consulting to Tony Wayne, U.S. EPA, memorandum of EPA/Semiconductor Industry Association Meeting on December 18, 1997.[A-97-15-II-E-4]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:06Z,,0,0,090000648407d42a
EPA-HQ-OAR-2002-0086-0141,EPA,EPA-HQ-OAR-2002-0086,"State of New Mexico, Air Quality Bureau to the U.S. EPA, Permit No. 325-M-8,Intel Corporation, Rio Rancho Facility dated 1/17/95.  [A-97-15-II-D-37]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:28Z,,0,0,0900006484189b0d
EPA-HQ-OAR-2002-0086-0101,EPA,EPA-HQ-OAR-2002-0086,"David Hendricks, EC/R Incorporated to Tony Wayne, U.S. EPA, transmittal of Definition of Source Category, Definition of Affected Source, and Subcategorization Issues for the Semiconductor NESHAP Project memorandum. [A-97-15-II-A-5]",Supporting & Related Material,Letter,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:40:52Z,,0,0,090000648407d3f5
EPA-HQ-OAR-2002-0086-0161,EPA,EPA-HQ-OAR-2002-0086,"SIA to U.S. EPA, transmittal of MACT 3 Survey Results from facilities 1819A, 1932A, 3493, 3719A, 3786, 3912A, 4434, 532121, 6103A, 6347A, 6393, 6412, 6786A, 8121A, 8366, and 8718A. [A-97-15-II-D-95]",Supporting & Related Material,Report,2020-03-11T04:00:00Z,2020,3,,,2020-03-11T15:41:45Z,,0,0,0900006484189b3d
EPA-HQ-OAR-2002-0086-0019,EPA,EPA-HQ-OAR-2002-0086,"A-97-15-F-R-MAY-8-2002
National Emission Standards for Hazardous Air Pollutants: Semiconductor Manufacturing",Proposed Rule,Notice of Proposed Rulemaking (NPRM),2019-10-10T04:00:00Z,2019,10,2019-10-10T04:00:00Z,2002-07-09T03:59:59Z,2019-10-10T18:26:50Z,02-11298,0,0,090000648407d37a
EPA-HQ-OAR-2002-0086-0017,EPA,EPA-HQ-OAR-2002-0086,National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing,Rule,Federal Register Document,2008-07-22T04:00:00Z,2008,7,,,2011-06-11T15:59:06Z,E8-16746,0,0,090000648068c597
EPA-HQ-OAR-2002-0086-0018,EPA,EPA-HQ-OAR-2002-0086,"National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing Final Rule, Response to Comments",Supporting & Related Material,Comment Response,2008-07-22T04:00:00Z,2008,7,,,2008-07-22T12:02:09Z,,0,0,090000648068a3cc
EPA-HQ-OAR-2002-0086-0014,EPA,EPA-HQ-OAR-2002-0086,"Memorandum to docket, Subject - Combined Hazardous Air Pollutant (HAP) Process Vent Maximum Achievable Control Technology (MACT) Floor for Semiconductor Maximum Achievable Control Technology (MACT) Supplemental Proposal (August 17, 2007)",Supporting & Related Material,"Letter, Memorandum, Email",2008-04-02T04:00:00Z,2008,4,,,2008-04-02T18:17:27Z,,0,0,09000064803e87d7
EPA-HQ-OAR-2002-0086-0015,EPA,EPA-HQ-OAR-2002-0086,National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing - Office of Management and Budget (OMB) Review,Supporting & Related Material,Federal Register Document,2008-04-02T04:00:00Z,2008,4,,,2011-06-11T15:59:05Z,,0,0,09000064803e881e
EPA-HQ-OAR-2002-0086-0013,EPA,EPA-HQ-OAR-2002-0086,National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing,Proposed Rule,Federal Register Document,2008-04-02T04:00:00Z,2008,4,2008-04-02T04:00:00Z,2008-05-03T03:59:59Z,2011-06-11T15:59:05Z,E8-06816,0,0,0900006480427512
EPA-HQ-OAR-2002-0086-0006,EPA,EPA-HQ-OAR-2002-0086,National Emission Standards for Hazardous Air Pollutants (NESHAP): Semiconductor Manufacturing - Summary of Public Comments and Responses on Proposed Rule [A-97-15 II-A-12],Supporting & Related Material,Comment Response,2008-02-02T13:16:35Z,2008,2,,,2006-09-02T14:12:29Z,,0,0,09000064800bacb0
EPA-HQ-OAR-2002-0086-0012,EPA,EPA-HQ-OAR-2002-0086,Kodak Building 81 South - Upgrade Exhaust Systems Final Technical Report,Supporting & Related Material,Report,2007-01-29T05:00:00Z,2007,1,,,2011-06-11T15:59:05Z,,0,0,09000064801d4454
EPA-HQ-OAR-2002-0086-0009,EPA,EPA-HQ-OAR-2002-0086,National Emission Standards for Hazardous Air Pollutants for Semiconductor Manufacturing,Proposed Rule,Federal Register Document,2006-10-19T12:20:00Z,2006,10,2006-10-19T12:20:00Z,2006-12-05T04:59:59Z,2011-06-11T15:59:06Z,E6-17224,0,0,09000064801d73c6
EPA-HQ-OAR-2002-0086-0002,EPA,EPA-HQ-OAR-2002-0086,"Supporting Statement - ICR No. 2042.02, OMB No. 2060-New Collection",Supporting & Related Material,Other,2003-02-28T05:00:00Z,2003,2,,,2006-09-02T14:12:29Z,,0,0,09000064800bac95
EPA-HQ-OAR-2002-0086-0003,EPA,EPA-HQ-OAR-2002-0086,"Supporting Tables - ICR No. 2042.02, OMB No. 2060-New Collection",Supporting & Related Material,Other,2003-02-28T05:00:00Z,2003,2,,,2006-09-02T14:12:29Z,,0,0,09000064800bac9c
EPA-HQ-OAR-2002-0086-0008,EPA,EPA-HQ-OAR-2002-0086,"Memorandum to John Schaefer, USEPA from David Hendricks, EC/R Incorporated re: Revised MACT Floor Recommendations for Process Vents for the Semiconductor Manufacturing Source Category in Response to Comments Received on the Proposed Rule [A-97-15 II-A-9]",Supporting & Related Material,Other,2003-02-28T05:00:00Z,2003,2,,,2006-09-02T14:12:30Z,,0,0,09000064800bacbc
EPA-HQ-OAR-2002-0086-0001,EPA,EPA-HQ-OAR-2002-0086,"OMB 83-I Form - ICR No. 2042.02, OMB No. 2060-New Collection",Supporting & Related Material,Office of Management and Budget (OMB),2003-02-28T05:00:00Z,2003,2,,,2006-09-02T14:12:29Z,,0,0,09000064800bac90
EPA-HQ-OAR-2002-0086-0005,EPA,EPA-HQ-OAR-2002-0086,Legacy Index for Docket A-97-15,Supporting & Related Material,Index,2002-07-08T04:00:00Z,2002,7,,,2020-11-12T17:22:02Z,,0,0,09000064800bacaa
EPA-HQ-OAR-2002-0086-0007,EPA,EPA-HQ-OAR-2002-0086,"Memorandum to John Schaefer, USEPA from David Hendricks, EC/R Incorporated re: MACT Floor Recommendation for the Semiconductor Manufacturing Source Category [A-97-15 II-A-7]",Supporting & Related Material,Other,2001-10-11T04:00:00Z,2001,10,,,2006-09-02T14:12:30Z,,0,0,09000064800bacb6